![]() ![]() These are therefore neglected leading to a considerable simplification of the dielectric tensor in particular, the complex issue of the equilibrium gradient terms is avoided. Finite Larmor radius effects are known to be negligible in industrial plasma sources. It employs a finite element discretization of rf fields in terms of electromagnetic potentials that is suitable for wave calculations in the lower hydrid range of frequencies where helicon waves typically propagate. ![]() The code includes the effects of collisional dissipation and the important parallel electron dynamics, such as Landau damping, that are necessary for the description of wave absorption. The code should find extensive application in the design and study of helicon wave driven plasma sources which are increasingly used for industrial plasma processing. We describe a 1D plasma kinetic code UFEM, which is specifically designed for the treatment of radiofrequency wave excitation and propagation in cylindrical low temperature plasmas.
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